Abstract - Piero Malcovati

The technological break-through introduced by the advent of microsensors, microsystems and MEMS in the last decades has enabled the widespread diffusion of sensing devices in a huge number of application fields, form consumer electronics and mobile devices to automotive and domotics, becoming one of the pillars of the Internet of Things (IoT). This lecture touches the most important aspects associated with the design and implementation of integrated microsystems, from MEMS operating principle and fabrication technology to integration with electronics and packaging. The most critical aspects in the design of MEMS devices and read-put electronics are also discussed, with the help of a few actual examples.

Piero Malcovati received the "Laurea" degree (Summa cum Laude) in Electronic Engineering from University of Pavia, Italy in 1991 and the Ph. D. degree in Electrical Engineering from ETH Zurich in 1996.
From 1996 to 2001 he has been Assistant Professor, from 2002 to 2017 Associate Professor, and since 2017 Full Professor at the Department of Electrical, Computer, and Biomedical Engineering of the University of Pavia. His research activities are focused on microsystems, microsensor interface circuits and high performance data converters. He has been member of the Technical Program Committees for several International Conferences, including ISSCC and ESSCIRC. He is Associate Editor of the IEEE Journal of Solid-State Circuits.